imec Institutional Repository Browsing {{ collection }} by Author "Datta, S."

Publication

Buried Power Rail Metal exploration towards the 1 nm Node

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Maes, J.W.

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Soulie, Jean-Philippe

Proceedings paper

2021, IEEE International Electron Devices Meeting (IEDM), DEC 11-16, 2021

Publication

Field effect and strainly localized carriers in the metal-insulator transition material VO2

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Jeong, J.W.

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Aetukuri, N.

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Rettner, C.

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Shukla, N.

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Freeman, E.

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Esfahani, D.N.

Journal article

2015, Physical Review Letters, (115) 19, p.196401

Publication

Selective ALD Mo Deposition in 10nm Contacts

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Maes, J. W.

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Zhu, C.

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Datta, S.

Proceedings paper

2023, IEEE International Interconnect Technology Conference (IITC) / IEEE Materials for Advanced Metallization Conference (MAM), MAY 22-25, 2023

Browsing by Author "Datta, S."