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Browsing by Author "De Backer, Eddy"

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    Wafer bevel protection during deep reactive ion etching

    Charavel, Remy
    ;
    Roig, Jaime
    ;
    Altamirano Sanchez, Efrain  
    ;
    Van Aelst, Joke  
    ;
    Devriendt, Katia  
    Journal article
    2011, IEEE Transactions on Semiconductor Manufacturing, (24) 2, p.358-365

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