Browsing by Author "De Boer, M."
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Publication The black silicon method. VIII. A study of the performance of etching silicon using Sf6/O-2-based chemistry with cryogenical wafer cooling and a high density ICP Source
;Jansen, Henri ;De Boer, M. ;Wensink, H. ;Kloeck, B.Elwenspoek, M.Journal article2001, Microelectronics Journal, (32) 9, p.769-777