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Browsing by Author "De Boer, M."

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    The black silicon method. VIII. A study of the performance of etching silicon using Sf6/O-2-based chemistry with cryogenical wafer cooling and a high density ICP Source

    Jansen, Henri
    ;
    De Boer, M.
    ;
    Wensink, H.
    ;
    Kloeck, B.
    ;
    Elwenspoek, M.
    Journal article
    2001, Microelectronics Journal, (32) 9, p.769-777

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