Browsing by Author "De Coster, J."

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Empirical and theoretical characterisation of electrostatically driven MEMS structures with stress gradients

De Coster, J.
;
Tilmans, Harrie
;
den Toonder, J.M.J.
;
van Beek, J.T.M.
;
Rijks, T.G.S.M.
Journal article
2005, Sensors & Actuators A, 123-124, p.555-562
Mechanical design of RF-MEMS capacitive switches

De Coster, J.
;
Tilmans, Harrie
;
Hameyer, K.
;
Puers, Bob
Proceedings paper
2002, Proceedings 3rd Workshop on Semiconductor Sensor and Actuator - SeSens, 29/11/2002, p.608-611