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Browsing by Author "De Marneffe, Jean-Francois"

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    ALD Encapsulation of CVD WS2 for Stable and High-Performance FET Devices

    Wu, Xiangyu  
    ;
    Lin, Dennis  
    ;
    Cott, Daire  
    ;
    De Marneffe, Jean-Francois
    ;
    Groven, Benjamin  
    Proceedings paper
    2021, 5th IEEE Electron Devices Technology and Manufacturing Conference (EDTM), APR 08-11, 2021

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