Publication:

ALD Encapsulation of CVD WS2 for Stable and High-Performance FET Devices

Date

2021
Proceedings Paper
https://doi.org/10.1109/EDTM50988.2021.9420940
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Author(s)

Wu, Xiangyu  
;
Lin, Dennis  
;
Cott, Daire  
;
De Marneffe, Jean-Francois
;
Groven, Benjamin  
;
Sergeant, Stefanie  
;
Shi, Yuanyuan  
;
Smets, Quentin  
;
Sutar, Surajit  
;
Asselberghs, Inge  
;
Radu, Iuliana  

Journal

na

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1887 since deposited on 2022-03-16
Acq. date: 2025-12-12

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1887 since deposited on 2022-03-16
Acq. date: 2025-12-12

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