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Browsing by Author "De Strycker, Steven"

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    Cleaning requirement in the thinning module for 3D-Stacked IC (3D-SIC) integration

    Wostyn, Kurt  
    ;
    Zhao, Ming  
    ;
    Cui, Hushan
    ;
    Laermans, Patrick  
    ;
    Jourdain, Anne  
    ;
    Verbinnen, Greet  
    Meeting abstract
    2010, 10th International Symposium on Ultra-Clean Processing of Semiconductor Devices - UCPSS, 19/09/2010, p.188-189

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