Browsing by Author "DeLuca, J"

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Non-oxidizing solvent-based strip of ion implanted photoresist

Tsvetanova, Diana
;
Vos, Rita
;
Vanstreels, Kris
;
Radisic, Dunja
;
Sonnemans, Roger
;
Berry, Ivan
Journal article
2012, Solid State Phenomena, 187, p.97-100
Non-oxidizing solvent-based strip of ion implanted photoresist

Tsvetanova, Diana
;
Vos, Rita
;
Vanstreels, Kris
;
Sonnemans, Roger
;
Berry, Ivan
;
Waldfried, Carlo
Meeting abstract
2010, 10th International Symposium on Ultra-Clean Processing of Semiconductor Surfaces, 20/09/2010