Publication:

Non-oxidizing solvent-based strip of ion implanted photoresist

Date

2012

Journal article

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Author(s)

Tsvetanova, Diana

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;

Vanstreels, Kris

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;

Sonnemans, Roger

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;

Waldfried, Carlo

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;

;

;

;

Parac-Vogt, Tatjana

;

Journal

Solid State Phenomena

Statistics

1939 since deposited on 2021-10-20

Acq. date: 2026-01-25