Publication:

Non-oxidizing solvent-based strip of ion implanted photoresist

Date

2012

Journal article

Simple item page Full metadata Statistics

Author(s)

Tsvetanova, Diana

;

;

Vanstreels, Kris

;

;

Sonnemans, Roger

;

;

Waldfried, Carlo

;

;

;

;

;

Parac-Vogt, Tatjana

;

Journal

Solid State Phenomena

Statistics

1941 since deposited on 2021-10-20

Acq. date: 2026-04-06