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Browsing by Author "DeLuca, James"

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    Publication

    Removal of high-dose ion-implanted 248nm deep UV photoresist using UV irradiation and organic solvent

    Tsvetanova, Diana  
    ;
    Vos, Rita  
    ;
    Vanstreels, Kris  
    ;
    Radisic, Dunja  
    ;
    Sonnemans, Roger
    ;
    Berry, Ivan
    Journal article
    2011, Journal of the Electrochemical Society, (158) 2, p.H150-H155

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