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Browsing by Author "Deguchi, Hiroki"

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    Bright-field EUV mask patterning for extending scaling roadmap

    Miyaguchi, Kenichi  
    ;
    Fujimura, Yukihiro
    ;
    Yamaji, Masataka
    ;
    Ebisawa, Mei
    ;
    Hotei, Izumi
    Proceedings paper
    2025, Photomask Technology, 2025-09-22, p.136870R

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