Browsing by Author "Delorme, Maxence"
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Publication Compact 2D OPC modeling of a metal oxide EUV resist for a 7nm node BEOL layer
Proceedings paper2017, Extreme Ultraviolet (EUV) Lithography VIII, 26/02/2017, p.101431EPublication Improving Silicon-photonics inverse-design printability by leveraging SEM contours for advanced Optical Proximity Correction techniques
Proceedings paper2022, Conference on Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XV Part of SPIE Photonics West OPTO Conference, JAN 22-FEB 24, 2022, p.1201208