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Browsing by Author "Demos, Alex"

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    Epitaxial growth of Ga-doped SiGe for reduction of contact resistance in finFET source/drain materials

    Margetis, Joe
    ;
    Kohen, David
    ;
    Porret, Clément  
    ;
    Petersen Barbosa Lima, Lucas  
    ;
    Khazaka, Rami  
    Proceedings paper
    2019-10, 2nd Joint ISTDM / ICSI 2019 Conference, 2/06/2019, p.7-10

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