Publication:
Epitaxial growth of Ga-doped SiGe for reduction of contact resistance in finFET source/drain materials
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1982 since deposited on 2021-10-27
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Acq. date: 2026-04-02
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1982 since deposited on 2021-10-27
1last month
1last week
Acq. date: 2026-04-02
Citations