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Epitaxial growth of Ga-doped SiGe for reduction of contact resistance in finFET source/drain materials
Publication:
Epitaxial growth of Ga-doped SiGe for reduction of contact resistance in finFET source/drain materials
Date
2019-10
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Margetis, Joe
;
Kohen, David
;
Porret, Clément
;
Petersen Barbosa Lima, Lucas
;
Khazaka, Rami
;
Rengo, Gianluca
;
Loo, Roger
;
Tolle, John
;
Demos, Alex
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1976
since deposited on 2021-10-27
Acq. date: 2025-10-25
Citations
Metrics
Views
1976
since deposited on 2021-10-27
Acq. date: 2025-10-25
Citations