Browsing by Author "Detavernier, Chrostophe"
Now showing 1 - 1 of 1
- Results per page
- Sort Options
Publication Sealing of low-k dielectric (k=2.0) with self-assembled monolayers (SAMs) for the atomic layer deposition (ALD) of TiN
Proceedings paper2013, Advanced Interconnects for Micro- and Nanoelectronics - Materials, Processes, and Reliability, 1/04/2013, p.AA05.22