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Browsing by Author "Detavernier, Chrostophe"

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    Sealing of low-k dielectric (k=2.0) with self-assembled monolayers (SAMs) for the atomic layer deposition (ALD) of TiN

    Sun, Yiting  
    ;
    Levrau, Elisabeth  
    ;
    Blauw, Michiel
    ;
    Meersschaut, Johan  
    ;
    Verdonck, Patrick  
    Proceedings paper
    2013, Advanced Interconnects for Micro- and Nanoelectronics - Materials, Processes, and Reliability, 1/04/2013, p.AA05.22

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