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Browsing by Author "Detavernier, G."

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    Interfacial reactions of Gd- and Nb-oxide based high-k layers deposited by aqueous chemical solution deposition

    Dewulf, Daan
    ;
    Peys, Nick
    ;
    Van Elshocht, Sven  
    ;
    Rampelberg, Geert
    ;
    Detavernier, G.
    ;
    De Gendt, Stefan  
    Journal article
    2011, Microelectronic Engineering, (88) 7, p.1338-1341

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