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Interfacial reactions of Gd- and Nb-oxide based high-k layers deposited by aqueous chemical solution deposition
Publication:
Interfacial reactions of Gd- and Nb-oxide based high-k layers deposited by aqueous chemical solution deposition
Date
2011
Journal article
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Dewulf, Daan
;
Peys, Nick
;
Van Elshocht, Sven
;
Rampelberg, Geert
;
Detavernier, G.
;
De Gendt, Stefan
;
Hardy, An
;
Van Bael, Marlies
Journal
Microelectronic Engineering
Abstract
Description
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1932
since deposited on 2021-10-19
Acq. date: 2025-10-23
Citations
Metrics
Views
1932
since deposited on 2021-10-19
Acq. date: 2025-10-23
Citations