Publication:

Interfacial reactions of Gd- and Nb-oxide based high-k layers deposited by aqueous chemical solution deposition

Date

2011
Journal article
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dc.contributor.authorDewulf, Daan
dc.contributor.authorPeys, Nick
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorRampelberg, Geert
dc.contributor.authorDetavernier, G.
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorHardy, An
dc.contributor.authorVan Bael, Marlies
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorHardy, An
dc.contributor.imecauthorVan Bael, Marlies
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.contributor.orcidimecVan Bael, Marlies::0000-0002-5516-7962
dc.date.accessioned2021-10-19T13:16:24Z
dc.date.available2021-10-19T13:16:24Z
dc.date.embargo9999-12-31
dc.date.issued2011
dc.identifier.issn0167-9317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18842
dc.source.beginpage1338
dc.source.endpage1341
dc.source.issue7
dc.source.journalMicroelectronic Engineering
dc.source.volume88
dc.title

Interfacial reactions of Gd- and Nb-oxide based high-k layers deposited by aqueous chemical solution deposition

dc.typeJournal article
dspace.entity.typePublication
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