Browsing by Author "Detzel, T."
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Publication Comparison of the performance of slurries for STI processing
;Detzel, T. ;Hosali, S. ;Sethuraman, A. ;Wang, J. F. ;Cook, L.Grillaert, JoostProceedings paper1997, Proceedings 2nd International Chemical-Mechanical Polish (C.M.P.) for ULSI Multilevel Interconnection Conference - CMP-MIC, 13/02/1997, p.202-208