Repository logo Institutional repository
  • Communities & Collections
  • Browse
  • Site
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Detzel, T."

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results Per Page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Comparison of the performance of slurries for STI processing

    Detzel, T.
    ;
    Hosali, S.
    ;
    Sethuraman, A.
    ;
    Wang, J. F.
    ;
    Cook, L.
    ;
    Grillaert, Joost
    Proceedings paper
    1997, Proceedings 2nd International Chemical-Mechanical Polish (C.M.P.) for ULSI Multilevel Interconnection Conference - CMP-MIC, 13/02/1997, p.202-208

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings