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Comparison of the performance of slurries for STI processing
Publication:
Comparison of the performance of slurries for STI processing
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Date
1997
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Detzel, T.
;
Hosali, S.
;
Sethuraman, A.
;
Wang, J. F.
;
Cook, L.
;
Grillaert, Joost
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1887
since deposited on 2021-09-30
1
last month
1
last week
Acq. date: 2026-01-26
Citations