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Browsing by Author "Devloo-Casier, K"

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    An experimental study of the growth mechanism of TiO2 Atomic Layer Deposition on surface modified nanoporous low-k films

    Levrau, Elisabeth  
    ;
    Devloo-Casier, K
    ;
    Dendooven, Jolien
    ;
    Verdonck, Patrick  
    ;
    Baklanov, Mikhaïl
    Meeting abstract
    2013, Materials for Advanced Metallization - MAM, 12/03/2013, p.121-122

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