Browsing by Author "Devonport, Joshua"
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Publication Determination of the model for the chemical structure of porous PECVD low-k films
Journal article2015, ECS Journal of Solid State Science and Technology, (4) 1, p.N3140-N3145Publication Effect of downstream plasma treatment on dissolution of fluorocarbon polymer in organic solvents
Proceedings paper2014, Ultra Clean Processing of Semiconductor Surfaces - UCPSS, 21/09/2014, p.197-200