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Browsing by Author "Dewolf, P."

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    On the nature of weak spots in high-k layers submitted to anneals

    Petry, Jasmine
    ;
    Vandervorst, Alain
    ;
    Richard, Olivier  
    ;
    Conard, Thierry  
    ;
    Dewolf, P.
    Proceedings paper
    2004, Integration of Advanced Micro- and Nanoelectronic Devices. Critical Issues and Solutions, 12/04/2004, p.203-208

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