Browsing by Author "DiBiase, Tony"
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Publication A methodology for the characterization of topography induced immersion bubble defects
Proceedings paper2005, Optical Microlithography XVIII, 27/02/2005, p.154-163Publication Full spectral analysis of line edge roughness
Proceedings paper2005, Metrology, Inspection, and Process Control for Microlithography XIX, 28/02/2005, p.499-509Publication On-line spectral analysis of line edge roughness: algorithms qualification and transfer to etch
Journal article2005, Semiconductor FabTech, 25, p.96-101