Skip to content
Institutional repository
Communities & Collections
Browse
Site
Log In
imec Publications
Conference contributions
A methodology for the characterization of topography induced immersion bubble defects
Publication:
A methodology for the characterization of topography induced immersion bubble defects
Date
2005
Proceedings Paper
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
12012.pdf
1.26 MB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Kocsis, Michael
;
De Bisschop, Peter
;
Maenhoudt, Mireille
;
Kim, Young-Chang
;
Wells, Greg
;
List, Scott
;
DiBiase, Tony
Journal
Abstract
Description
Metrics
Views
1962
since deposited on 2021-10-16
Acq. date: 2025-10-22
Citations
Metrics
Views
1962
since deposited on 2021-10-16
Acq. date: 2025-10-22
Citations