Repository logo Institutional repository
  • Communities & Collections
  • Browse
  • Site
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Diab, Hesham"

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results Per Page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Flare in extreme ultraviolet lithography: metrology, out-of-band radiation, fractal point spread function, and flare map calibration

    Lorusso, Gian  
    ;
    Van Roey, Frieda  
    ;
    Hendrickx, Eric  
    ;
    Fenger, Germain
    ;
    Lam, Michael
    Journal article
    2009, Journal of Micro/Nanolithography, MEMS, and MOEMS, (8) 4, p.41505

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings