Browsing by Author "Dieu, B."
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Publication Chemical and electrical dopant profiling for P-type junctions formed by solid phase epitaxial regrowth
Proceedings paper2003, Characterization and Metrology for ULSI, 24/03/2003Publication CMOS scaling beyond the 90 nm CMOS technology node: shallow junction and integration challenges
Proceedings paper2003, Ultra Shallow Junctions. 7th Int. Worksh. Fabrication, Characterization and Modeling of Ultra Shallow Doping Profiles in Semic., 27/04/2003, p.15-22