Browsing by Author "Dieu, Laurent"
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Publication Mighty hight-t lithography for 65nm generation contacts
;Conley, Will ;Montgomery, Patrick ;Lucas, Kevin ;Litt, Lloyd C. ;Maltabes, John G.Dieu, LaurentProceedings paper2003, Optical Microlithography XVI, 23/02/2003, p.1210-1219