Publication:

Mighty hight-t lithography for 65nm generation contacts

Date

2003

Proceedings Paper

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Files

7604.pdf 1.25 MB

Author(s)

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Montgomery, Patrick

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Maltabes, John G.

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;

Hughes, Gregory P,

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Mellenthin, David L.

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Socha, Robert J.

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Fanucchi, Eric L.

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Verhappen, Arjan

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Wampler, Kurt E.

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Schaefer, Erika

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Kuijten, Jan P.

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Pijnenburg, Wil

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;

Vandenberghe, Geert

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