Browsing by Author "Dillen, Harm"
Now showing 1 - 3 of 3
- Results Per Page
- Sort Options
Publication CD-SEM distortion quantification for EPE metrology and contour analysis
Proceedings paper2017, Metrology, Inspection, and Process Control for Microlithography XXXI, 26/02/2017, p.1014515Publication Feature grouping to enable edge placement error-aware process control in multi-feature logic use case
Proceedings paper2024, Conference on Metrology, Inspection, and Process Control XXXVIII, FEB 26-29, 2024, p.Art. 129550OPublication Pattern selection strategy by clustering for logic EPE monitoring