Skip to content
Institutional repository
Communities & Collections
Browse
Site
Log In
imec Publications
Conference contributions
Feature grouping to enable edge placement error-aware process control in multi-feature logic use case
Publication:
Feature grouping to enable edge placement error-aware process control in multi-feature logic use case
Date
2024
Proceedings Paper
https://doi.org/10.1117/12.3010421
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
Published version
1.86 MB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Schelcher, Guillaume
;
Athayde, Marsil
;
Schoofs, Stijn
;
Hsia, Jeff
;
Khalik, Zuan
;
Li, Fahong
;
Nechaev, Konstantin
;
Sahraeian, Reza
;
Tamaddon, Amir-Hossein
;
Blanco, Victor
;
van der Sanden, Stefan
;
Zhang, Yichen
;
Anunciado, Roy
;
Dillen, Harm
;
Leray, Philippe
Journal
Proceedings of SPIE
Abstract
Description
Metrics
Downloads
60
since deposited on 2024-06-15
43
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Views
630
since deposited on 2024-06-15
412
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations
Metrics
Downloads
60
since deposited on 2024-06-15
43
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Views
630
since deposited on 2024-06-15
412
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations