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Browsing by Author "Dochain, Denis"

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    Using water structuring by ions to address pattern loading in wet HF-based oxide recess etch

    Vereecke, Guy  
    ;
    De Coster, Hanne  
    ;
    Dochain, Denis
    ;
    Nurekeyeva, Kunsulu
    ;
    Conlan, Shona
    Journal article
    2023, MICROELECTRONIC ENGINEERING, (279) 15 July, p.Art. 112058

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