Browsing by Author "Docherty, F.T."

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A nanoanalytical investigation of elemental distributions in high-k dielectric gate stacks on silicon

Docherty, F.T.
;
MacKenzie, M.
;
Craven, A.J.
;
McComb, D.W.
;
De Gendt, Stefan
;
McFadzean, S.
Journal article
2008-01, Microelectronic Engineering, (85) 1, p.61-64
Advanced nanoanalysis of a Hf-based high-k dielectric stack prior to activation

MacKenzie, M.
;
Craven, A.J.
;
McComb, D.W.
;
De Gendt, Stefan
;
Docherty, F.T.
;
McGilvery, C.M.
Journal article
2007, Electrochemical and Solid-State Letters, (10) 6, p.G33-G35
Nucleation, crystallization and phase segregation in HfO2 and HfSiO

McGilvery, C.M.
;
McFadzean, S.
;
Docherty, F.T.
;
Craven, A.J.
;
McComb, D.W.
;
De Gendt, Stefan
Proceedings paper
2007, Microscopy of Semiconducting Materials XV, 2/04/2007, p.325-328