Browsing by Author "Don, Eric"
Now showing 1 - 3 of 3
- Results per page
- Sort Options
Publication Control of laser induced interface traps with in-line corona charge metrology
Proceedings paper2008, 16th Annual IEEE International Conference on Advanced Thermal Processing of Semiconductors - RTP, 30/09/2008, p.163-168Publication Monitoring plasma nitridation of HfSiOx by corona charge measurements
Journal article2007, Microelectronic Engineering, (84) 9_10, p.2251-2254Publication Use of corona charge photo-conductance decay (charge-PCD) for fast metal contamination monitoring of high temperature processes
Proceedings paper2008, IEEE/SEMI Advanced Semiconductor Manufacturing Conference - ASMC, 5/05/2008, p.397-401