Repository logo Institutional repository
  • Communities & Collections
  • Scientific publicationsOpen knowledge
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Dordi, Yezdi"

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results per page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Enabling sub 20nm Cu metallization with PEALD Ru-TiN barrier and ELD seed

    Siew, Yong Kong  
    ;
    Swerts, Johan  
    ;
    Dictus, Dries  
    ;
    El-Mekki, Zaid  
    ;
    Armini, Silvia  
    ;
    Dordi, Yezdi
    Meeting abstract
    2012, Advanced Metallization Conference, 9/10/2012

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings