Browsing by Author "Douglas, M."
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Publication Capablities of TOF-SIMS to study the influence of different oxidation conditions on metal contamination redistribution
Proceedings paper1999, Analytical and Diagnostic Techniques for Semiconductor Materials, Devices, and Processes, 16/09/1999, p.147-159Publication Evaluation of time-of-flight secondary ion mass spectrometry for metal contamination monitoring on Si wafer surfaces
Journal article2000, Journal of the Electrochemical Society, (147) 5, p.1915-1919