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Capablities of TOF-SIMS to study the influence of different oxidation conditions on metal contamination redistribution
Publication:
Capablities of TOF-SIMS to study the influence of different oxidation conditions on metal contamination redistribution
Date
1999
Proceedings Paper
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3346.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
De Witte, Hilde
;
De Gendt, Stefan
;
Douglas, M.
;
Conard, Thierry
;
Kenis, Karine
;
Mertens, Paul
;
Vandervorst, Wilfried
;
Gijbels, Renaat
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Abstract
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2038
since deposited on 2021-10-06
Acq. date: 2025-10-23
Citations
Metrics
Views
2038
since deposited on 2021-10-06
Acq. date: 2025-10-23
Citations