Publication:

Capablities of TOF-SIMS to study the influence of different oxidation conditions on metal contamination redistribution

Date

1999
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorDe Witte, Hilde
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorDouglas, M.
dc.contributor.authorConard, Thierry
dc.contributor.authorKenis, Karine
dc.contributor.authorMertens, Paul
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorGijbels, Renaat
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorKenis, Karine
dc.contributor.imecauthorMertens, Paul
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.date.accessioned2021-10-06T10:59:08Z
dc.date.available2021-10-06T10:59:08Z
dc.date.embargo9999-12-31
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3384
dc.source.beginpage147
dc.source.conferenceAnalytical and Diagnostic Techniques for Semiconductor Materials, Devices, and Processes
dc.source.conferencedate16/09/1999
dc.source.conferencelocationLeuven Belgium
dc.source.endpage159
dc.title

Capablities of TOF-SIMS to study the influence of different oxidation conditions on metal contamination redistribution

dc.typeProceedings paper
dspace.entity.typePublication
Files

Original bundle

Name:
3346.pdf
Size:
666.58 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions