Browsing by Author "Drieskens, Frederik"
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Publication Modification of post-etch residues by UV for wet removal
Meeting abstract2010, 10th International Symposium on Ultra-Clean Processing of Semiconductor Devices - UCPSS, 19/09/2010, p.50-51Publication Modification of post-etch residues by UV for wet removal
Journal article2012, Solid State Phenomena, 187, p.207-210