Browsing by Author "Drouet, M."
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Publication Comparison of defects created by plasma-based ion implantation and conventional implantation of hydrogen in germanium
Proceedings paper2008, Gettering and Defect Engineering in Semiconductor Technology XII, 14/10/2007, p.101-106Publication Defects created by plasma immersion ion implantation of hydrogen in germanium
Oral presentation2007, MRS Spring Meeting Symposium F: Semiconductor Defect Engineering - Materials, Synthesis, Structures and Devices IIPublication Extended defects created by hydrogen implantation in germanium: the influence of the substrate temperature
Oral presentation2008, International Conference on Extended Defects in Semiconductors - EDSPublication Extended defects created by light ion implantation in Germanium
Publication The effect of the substrate temperature on extended defects created by hydrogen implantation in germanium
Journal article2007, Journal of Applied Physics, (102) 9, p.96101