Browsing by Author "Dultsev, F.N."
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Publication Optimization of low-k UV curing: effect of wavelength on critical properties of the dielectric
Proceedings paper2009, Materials, Processes and Reliability for Advanced Interconnects for Micro- and Nanoelectronics, 14/04/2009, p.1156-D02-08Publication Plasma modification of Si-O-Si bond structure in porous SiOCH films