Browsing by Author "Dussarrat, C."
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Publication A novel low temperature etch approach to reduce ULK plasma damage
Meeting abstract2015, Plasma Etch and Strip in Microtechnology - PESM, 27/04/2015Publication Adsorption isobars of fluorocarbon compounds selected for cryogenic etching of low-k materials
Meeting abstract2015, Spring MRS Meeting Symposium BB: Innovative Interconnects/Electrodes for Advances Devices, Flexible and Green Energy Electronics, 6/04/2015, p.BB2.03