Publication:

A novel low temperature etch approach to reduce ULK plasma damage

Date

2015

Meeting abstract

Simple item page Full metadata Statistics

Files

31902.pdf 381.68 KB

Author(s)

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de Marneffe, Jean-Francois

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De Gendt, Stefan

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Baklanov, Mikhaïl

Statistics

2039 since deposited on 2021-10-23

Acq. date: 2026-07-09