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Browsing by Author "Dussart, Rami"

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    Damage free cryogenic etching of porous organosilica ultralow-k film

    Zhang, Liping  
    ;
    Liazouli, Remi
    ;
    Dussart, Rami
    ;
    Lefaucheux, Philippe
    ;
    Tillocher, Thomas
    Meeting abstract
    2012, AVS 59th Annual International Symposium and Exhibition, 28/10/2012

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