Repository logo Institutional repository
  • Communities & Collections
  • Scientific publicationsOpen knowledge
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Dziura, Thaddeus"

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results per page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Spectroscopic critical dimension technology (SCD) for directed self assembly

    Nishibe, Senichi
    ;
    Dziura, Thaddeus
    ;
    Nagaswami, Venkat
    ;
    Gronheid, Roel  
    Proceedings paper
    2014, Metrology, Inspection, and Process Control for Microlithography XXVIII, 24/02/2014, p.90502U

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings