Publication:

Spectroscopic critical dimension technology (SCD) for directed self assembly

Date

2014

Proceedings Paper

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Files

27899.pdf 2.37 MB

Author(s)

Nishibe, Senichi

;

Dziura, Thaddeus

;

Nagaswami, Venkat

;

Metrics

1875 since deposited on 2021-10-22

Acq. date: 2025-12-11