Publication:

Spectroscopic critical dimension technology (SCD) for directed self assembly

Date

2014
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorNishibe, Senichi
dc.contributor.authorDziura, Thaddeus
dc.contributor.authorNagaswami, Venkat
dc.contributor.authorGronheid, Roel
dc.contributor.imecauthorGronheid, Roel
dc.date.accessioned2021-10-22T04:18:53Z
dc.date.available2021-10-22T04:18:53Z
dc.date.embargo9999-12-31
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24324
dc.identifier.urlhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1859819
dc.source.beginpage90502U
dc.source.conferenceMetrology, Inspection, and Process Control for Microlithography XXVIII
dc.source.conferencedate24/02/2014
dc.source.conferencelocationSan Jose, CA USA
dc.title

Spectroscopic critical dimension technology (SCD) for directed self assembly

dc.typeProceedings paper
dspace.entity.typePublication
Files

Original bundle

Name:
27899.pdf
Size:
2.37 MB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions