Browsing by Author "Ebeling, Rob"
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Publication Lifetime test on EUV photomask with EBL2
Proceedings paper2019-05, Photomask Japan 2019: XXVI Symposium on Photomask and Next-Generation Lithography Mask Technology, 16/04/2019, p.111780EPublication Novel metrology for mask degradation: IR-AFM, XPS depth profiling and HAXPES