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Browsing by Author "Ebiko, Sodai"

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    Publication

    Exploring Bonding Mechanism of SiCN for Hybrid Bonding

    Ebiko, Sodai
    ;
    Iacovo, Serena  
    ;
    Chew, Soon Aik  
    ;
    Zhang, Boyao  
    ;
    Uedono, Akira
    ;
    Inoue, Fumihiro
    Proceedings paper
    2024, IEEE 74th Electronic Components and Technology Conference (ECTC), MAY 28-31, 2024, p.1953-1957

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