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Browsing by Author "Economou, Demetre"

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    Method for in-situ etch uniformity monitoring using plasma emission interferometry

    Samara, Vladimir
    ;
    de Marneffe, Jean-Francois  
    ;
    El Otell, Ziad  
    ;
    Economou, Demetre
    Journal article
    2015, Journal of Vacuum Science and Technology B, (33) 3, p.31206

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